The effect of slurries on lapping performance of fixed abrasive pad for Si(3)N(4) ceramics

In this paper, a series of experiments were carried out to explore the effect of slurry pH on materials removal rate (MRR) and surface quality in lapping of Si(3)N(4) ceramics wafers with fixed abrasive pad (FAP) using different slurries with different pH. Then, the scanning electron microscope was...

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Detalles Bibliográficos
Autores principales: Zhankui, Wang, Minghua, Pang, Mingchao, Liang, Jianguo, Yao, Lijie, Ma, Jianxiu, Su
Formato: Online Artículo Texto
Lenguaje:English
Publicado: SAGE Publications 2020
Materias:
Original Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10450894/
https://www.ncbi.nlm.nih.gov/pubmed/33356917
http://dx.doi.org/10.1177/0036850420982451

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10450894/
https://www.ncbi.nlm.nih.gov/pubmed/33356917
http://dx.doi.org/10.1177/0036850420982451

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