Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

This paper proposes a reem-shaped phononic crystal for the performance enhancement of TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that prevents energy leakage through the supporting substrate upon its placement at the anchoring boundary, resulting in signifi...

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Detalles Bibliográficos
Autores principales: Awad, Mohammed, Workie, Temesgen Bailie, Bao, Jing-Fu, Hashimoto, Ken-ya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456275/
https://www.ncbi.nlm.nih.gov/pubmed/37630076
http://dx.doi.org/10.3390/mi14081540

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456275/
https://www.ncbi.nlm.nih.gov/pubmed/37630076
http://dx.doi.org/10.3390/mi14081540

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