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Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful...

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Detalles Bibliográficos
Autores principales: Liu, Yan, Jiang, Xin, Yang, Haotian, Qin, Hongbo, Wang, Weidong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456366/
https://www.ncbi.nlm.nih.gov/pubmed/37630043
http://dx.doi.org/10.3390/mi14081507