Analysis of the Thermally Induced Packaging Effects on the Frequency Drift of Micro-Electromechanical System Resonant Accelerometer

Due to the working principle of MEMS resonant accelerometers, their thermally induced frequency drift is an inevitable practical issue for their extensive application. This paper is focused on reducing the thermally induced packaging effects on the frequency drift. A leadless ceramic chip carrier pa...

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Detalles Bibliográficos
Autores principales: Bie, Xiaorui, Xiong, Xingyin, Wang, Zheng, Yang, Wuhao, Li, Zhitian, Zou, Xudong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456425/
https://www.ncbi.nlm.nih.gov/pubmed/37630092
http://dx.doi.org/10.3390/mi14081556

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456425/
https://www.ncbi.nlm.nih.gov/pubmed/37630092
http://dx.doi.org/10.3390/mi14081556

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