High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical e...

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Detalles Bibliográficos
Autores principales: Shi, Shuzheng, Ma, Liyong, Kang, Kai, Zhu, Jie, Hu, Jinjiang, Ma, Hong, Pang, Yongjun, Wang, Zhanying
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456523/
https://www.ncbi.nlm.nih.gov/pubmed/37630134
http://dx.doi.org/10.3390/mi14081598

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456523/
https://www.ncbi.nlm.nih.gov/pubmed/37630134
http://dx.doi.org/10.3390/mi14081598

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