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Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection

The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based...

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Detalles Bibliográficos
Autores principales: Cui, Min, Chuai, Senhui, Huang, Yong, Liu, Yang, Li, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456628/
https://www.ncbi.nlm.nih.gov/pubmed/37630101
http://dx.doi.org/10.3390/mi14081565