A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation

This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as an output signal to eliminate the feedthrough interference from the driving voltage. The sensor is composed of a resonat...

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Detalles Bibliográficos
Autores principales: Liu, Xiangming, Xia, Shanhong, Peng, Chunrong, Gao, Yahao, Peng, Simin, Zhang, Zhouwei, Zhang, Wei, Xing, Xuebin, Liu, Yufei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456665/
https://www.ncbi.nlm.nih.gov/pubmed/37630029
http://dx.doi.org/10.3390/mi14081489

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456665/
https://www.ncbi.nlm.nih.gov/pubmed/37630029
http://dx.doi.org/10.3390/mi14081489

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