Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

The Micro-Electro-Mechanical-System (MEMS) micromirror has shown great advantages in Light Detection and Ranging (LiDAR) for autonomous vehicles. The equipment on vehicles is usually exposed to environmental vibration that may degrade or even destroy the flexure of the micromirror for its delicate s...

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Detalles Bibliográficos
Autores principales: Qian, Lei, Shan, Yameng, Wang, Junduo, Li, Haoxiang, Wang, Kewei, Yu, Huijun, Zhou, Peng, Shen, Wenjiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456790/
https://www.ncbi.nlm.nih.gov/pubmed/37630025
http://dx.doi.org/10.3390/mi14081490

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456790/
https://www.ncbi.nlm.nih.gov/pubmed/37630025
http://dx.doi.org/10.3390/mi14081490

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