Structural Design and Simulation of a Multi-Channel and Dual Working Condition Wafer Defect Inspection Prototype

Detecting and classifying defects on unpatterned wafers is a key part of wafer front-end inspection. Defect inspection schemes vary depending on the type and location of the defects. In this paper, the structure of the prototype is designed to meet the requirements of wafer surface and edge defect i...

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Detalles Bibliográficos
Autores principales: Ding, Ruizhe, Luo, Haiyan, Li, Zhiwei, Zhou, Zuoda, Qu, Dingjun, Xiong, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456950/
https://www.ncbi.nlm.nih.gov/pubmed/37630105
http://dx.doi.org/10.3390/mi14081568

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456950/
https://www.ncbi.nlm.nih.gov/pubmed/37630105
http://dx.doi.org/10.3390/mi14081568

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