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Structural Design and Simulation of a Multi-Channel and Dual Working Condition Wafer Defect Inspection Prototype
Detecting and classifying defects on unpatterned wafers is a key part of wafer front-end inspection. Defect inspection schemes vary depending on the type and location of the defects. In this paper, the structure of the prototype is designed to meet the requirements of wafer surface and edge defect i...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456950/ https://www.ncbi.nlm.nih.gov/pubmed/37630105 http://dx.doi.org/10.3390/mi14081568 |