Silicon photonic acoustic detector (SPADE) using a silicon nitride microring resonator

Silicon photonics is an emerging platform for acoustic sensing, offering exceptional miniaturization and sensitivity. While efforts have focused on silicon-based resonators, silicon nitride resonators can potentially achieve higher Q-factors, further enhancing sensitivity. In this work, a 30 µm sili...

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Detalles Bibliográficos
Autores principales: Nagli, Michael, Moisseev, Ron, Suleymanov, Nathan, Kaminski, Eitan, Hazan, Yoav, Gelbert, Gil, Goykhman, Ilya, Rosenthal, Amir
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2023
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10461202/
https://www.ncbi.nlm.nih.gov/pubmed/37645254
http://dx.doi.org/10.1016/j.pacs.2023.100527

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10461202/
https://www.ncbi.nlm.nih.gov/pubmed/37645254
http://dx.doi.org/10.1016/j.pacs.2023.100527

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