A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams

Electrothermal bimorph-based scanning micromirrors typically employ standard silicon dioxide (SiO(2)) as the electrothermal isolation material. However, due to the brittle nature of SiO(2), such micromirrors may be incapable to survive even slight collisions, which greatly limits their application r...

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Detalles Bibliográficos
Autores principales: Yang, Hengzhang, Ren, Anrun, Ding, Yingtao, Xiao, Lei, Pan, Teng, Yan, Yangyang, Jiao, Wenlong, Xie, Huikai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10465609/
https://www.ncbi.nlm.nih.gov/pubmed/37654693
http://dx.doi.org/10.1038/s41378-023-00570-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10465609/
https://www.ncbi.nlm.nih.gov/pubmed/37654693
http://dx.doi.org/10.1038/s41378-023-00570-8

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