Cargando…
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams
Electrothermal bimorph-based scanning micromirrors typically employ standard silicon dioxide (SiO(2)) as the electrothermal isolation material. However, due to the brittle nature of SiO(2), such micromirrors may be incapable to survive even slight collisions, which greatly limits their application r...
| Autores principales: | , , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10465609/ https://www.ncbi.nlm.nih.gov/pubmed/37654693 http://dx.doi.org/10.1038/s41378-023-00570-8 |