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In‐Grain Ferroelectric Switching in Sub‐5 nm Thin Al(0.74)Sc(0.26)N Films at 1 V
Analog switching in ferroelectric devices promises neuromorphic computing with the highest energy efficiency if limited device scalability can be overcome. To contribute to a solution, one reports on the ferroelectric switching characteristics of sub‐5 nm thin Al(0.74)Sc(0.26)N films grown on Pt/Ti/...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
John Wiley and Sons Inc.
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10477852/ https://www.ncbi.nlm.nih.gov/pubmed/37382398 http://dx.doi.org/10.1002/advs.202302296 |