Super High-Concentration Si and N Doping of CVD Diamond Film by Thermal Decomposition of Silicon Nitride Substrate

The high-concentration N doping of diamond film is still a challenge since nitrogen is limited during diamond growth. In this work, a novel method combined with the thermal decomposition of silicon nitride was proposed to form the activated N and Si components in the reactor gas that surrounded the...

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Detalles Bibliográficos
Autores principales: Yang, Yong, Wang, Yongnian, Yan, Huaxin, Cao, Chenyi, Chen, Naichao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10488532/
https://www.ncbi.nlm.nih.gov/pubmed/37687544
http://dx.doi.org/10.3390/ma16175849

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10488532/
https://www.ncbi.nlm.nih.gov/pubmed/37687544
http://dx.doi.org/10.3390/ma16175849

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