Increasing the Accuracy of the Characterization of a Thin Semiconductor or Dielectric Film on a Substrate from Only One Quasi-Normal Incidence UV/Vis/NIR Reflectance Spectrum of the Sample

OEMT is an existing optimizing envelope method for thin-film characterization that uses only one transmittance spectrum, T(λ), of the film deposited on the substrate. OEMT computes the optimized values of the average thickness, [Formula: see text] , and the thickness non-uniformity, Δd, employing va...

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Detalles Bibliográficos
Autores principales: Minkov, Dorian, Angelov, George, Marquez, Emilio, Radonov, Rossen, Rusev, Rostislav, Nikolov, Dimitar, Ruano, Susana
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10489747/
https://www.ncbi.nlm.nih.gov/pubmed/37686915
http://dx.doi.org/10.3390/nano13172407

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10489747/
https://www.ncbi.nlm.nih.gov/pubmed/37686915
http://dx.doi.org/10.3390/nano13172407

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