Acoustic Waves in Piezoelectric Layered Structure for Selective Detection of Liquid Viscosity

The acoustic waves of higher orders propagating in a layered structure consisting of a silicon plate coated with piezoelectric ZnO and/or AlN films were used for the development of a sensor with selective sensitivity to liquid viscosity η in the range of 1–1500 cP. In that range, this sensor possess...

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Detalles Bibliográficos
Autores principales: Smirnov, Andrey, Anisimkin, Vladimir, Shamsutdinova, Elizaveta, Signore, Maria-Assunta, Francioso, Luca, Zykov, Kirill, Baklaushev, Vladimir, Kuznetsova, Iren
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10489902/
https://www.ncbi.nlm.nih.gov/pubmed/37687786
http://dx.doi.org/10.3390/s23177329

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10489902/
https://www.ncbi.nlm.nih.gov/pubmed/37687786
http://dx.doi.org/10.3390/s23177329

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