Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS(2)...

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Detalles Bibliográficos
Autores principales: Liang, Xiaorui, Zhang, Lei, Tan, Qiulin, Cheng, Wenhua, Hu, Dan, Li, Shuang, Jing, Lin, Xiong, Jijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10493225/
https://www.ncbi.nlm.nih.gov/pubmed/37701521
http://dx.doi.org/10.1038/s41378-023-00586-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10493225/
https://www.ncbi.nlm.nih.gov/pubmed/37701521
http://dx.doi.org/10.1038/s41378-023-00586-0

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