Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS(2)...

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Autores principales: Liang, Xiaorui, Zhang, Lei, Tan, Qiulin, Cheng, Wenhua, Hu, Dan, Li, Shuang, Jing, Lin, Xiong, Jijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10493225/
https://www.ncbi.nlm.nih.gov/pubmed/37701521
http://dx.doi.org/10.1038/s41378-023-00586-0
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author Liang, Xiaorui
Zhang, Lei
Tan, Qiulin
Cheng, Wenhua
Hu, Dan
Li, Shuang
Jing, Lin
Xiong, Jijun
author_facet Liang, Xiaorui
Zhang, Lei
Tan, Qiulin
Cheng, Wenhua
Hu, Dan
Li, Shuang
Jing, Lin
Xiong, Jijun
author_sort Liang, Xiaorui
collection PubMed
description This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS(2)@Go (MMG) composite to widen the humidity detection range and improve the humidity sensitivity, including a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor was shown to operate steadily between 25–700 °C, 0–700 kPa, and 10–98% RH. Coupling issues among multiple parameters in complex environments were addressed by decoupling the Δf-temperature coupling factor to improve the accuracy. Therefore, this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions. [Image: see text]
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spelling pubmed-104932252023-09-12 Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS Liang, Xiaorui Zhang, Lei Tan, Qiulin Cheng, Wenhua Hu, Dan Li, Shuang Jing, Lin Xiong, Jijun Microsyst Nanoeng Article This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS(2)@Go (MMG) composite to widen the humidity detection range and improve the humidity sensitivity, including a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor was shown to operate steadily between 25–700 °C, 0–700 kPa, and 10–98% RH. Coupling issues among multiple parameters in complex environments were addressed by decoupling the Δf-temperature coupling factor to improve the accuracy. Therefore, this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions. [Image: see text] Nature Publishing Group UK 2023-09-11 /pmc/articles/PMC10493225/ /pubmed/37701521 http://dx.doi.org/10.1038/s41378-023-00586-0 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Liang, Xiaorui
Zhang, Lei
Tan, Qiulin
Cheng, Wenhua
Hu, Dan
Li, Shuang
Jing, Lin
Xiong, Jijun
Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS
title Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS
title_full Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS
title_fullStr Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS
title_full_unstemmed Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS
title_short Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS
title_sort temperature, pressure, and humidity saw sensor based on coplanar integrated lgs
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10493225/
https://www.ncbi.nlm.nih.gov/pubmed/37701521
http://dx.doi.org/10.1038/s41378-023-00586-0
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