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Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS(2)...

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Detalles Bibliográficos
Autores principales:	Liang, Xiaorui, Zhang, Lei, Tan, Qiulin, Cheng, Wenhua, Hu, Dan, Li, Shuang, Jing, Lin, Xiong, Jijun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10493225/ https://www.ncbi.nlm.nih.gov/pubmed/37701521 http://dx.doi.org/10.1038/s41378-023-00586-0

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