Atomic layer deposition of Y(2)O(3) films using a novel liquid homoleptic yttrium precursor tris(sec-butylcyclopentadienyl)yttrium [Y((s)BuCp)(3)] and water

Atomic layer deposition (ALD) of Y(2)O(3) thin films was studied using a novel homoleptic yttrium ALD precursor: tris(sec-butylcyclopentadienyl)yttrium [Y((s)BuCp)(3)]. Y((s)BuCp)(3) is a liquid at room temperature. The thermogravimetry curve for Y((s)BuCp)(3) is clean, with no indication of decompo...

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Detalles Bibliográficos
Autores principales: Nishida, Akihiro, Katayama, Tsukasa, Matsuo, Yasutaka
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2023
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10496032/
https://www.ncbi.nlm.nih.gov/pubmed/37705987
http://dx.doi.org/10.1039/d3ra05217f

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10496032/
https://www.ncbi.nlm.nih.gov/pubmed/37705987
http://dx.doi.org/10.1039/d3ra05217f

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