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Atomic layer deposition of Y(2)O(3) films using a novel liquid homoleptic yttrium precursor tris(sec-butylcyclopentadienyl)yttrium [Y((s)BuCp)(3)] and water
Atomic layer deposition (ALD) of Y(2)O(3) thin films was studied using a novel homoleptic yttrium ALD precursor: tris(sec-butylcyclopentadienyl)yttrium [Y((s)BuCp)(3)]. Y((s)BuCp)(3) is a liquid at room temperature. The thermogravimetry curve for Y((s)BuCp)(3) is clean, with no indication of decompo...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10496032/ https://www.ncbi.nlm.nih.gov/pubmed/37705987 http://dx.doi.org/10.1039/d3ra05217f |