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Wafer‐Level Manufacturing of MEMS H(2) Sensing Chips Based on Pd Nanoparticles Modified SnO(2) Film Patterns

In this manuscript, a simple method combining atomic layer deposition and magnetron sputtering is developed to fabricate high‐performance Pd/SnO(2) film patterns applied for micro‐electro‐mechanical systems (MEMS) H(2) sensing chips. SnO(2) film is first accurately deposited in the central areas of...

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Detalles Bibliográficos
Autores principales: Zhang, Zheng, Luo, Liyang, Zhang, Yanlin, Lv, Guoliang, Luo, Yuanyuan, Duan, Guotao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: John Wiley and Sons Inc. 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10502828/
https://www.ncbi.nlm.nih.gov/pubmed/37400367
http://dx.doi.org/10.1002/advs.202302614
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author Zhang, Zheng
Luo, Liyang
Zhang, Yanlin
Lv, Guoliang
Luo, Yuanyuan
Duan, Guotao
author_facet Zhang, Zheng
Luo, Liyang
Zhang, Yanlin
Lv, Guoliang
Luo, Yuanyuan
Duan, Guotao
author_sort Zhang, Zheng
collection PubMed
description In this manuscript, a simple method combining atomic layer deposition and magnetron sputtering is developed to fabricate high‐performance Pd/SnO(2) film patterns applied for micro‐electro‐mechanical systems (MEMS) H(2) sensing chips. SnO(2) film is first accurately deposited in the central areas of MEMS micro hotplate arrays by a mask‐assistant method, leading the patterns with wafer‐level high consistency in thickness. The grain size and density of Pd nanoparticles modified on the surface of the SnO(2) film are further regulated to obtain an optimized sensing performance. The resulting MEMS H(2) sensing chips show a wide detection range from 0.5 to 500 ppm, high resolution, and good repeatability. Based on the experiments and density functional theory calculations, a sensing enhancement mechanism is also proposed: a certain amount of Pd nanoparticles modified on the SnO(2) surface could bring stronger H(2) adsorption followed by dissociation, diffusion, and reaction with surface adsorbed oxygen species. Obviously, the method provided here is quite simple and effective for the manufacturing of MEMS H(2) sensing chips with high consistency and optimized performance, which may also find broad applications in other MEMS chip technologies.
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spelling pubmed-105028282023-09-16 Wafer‐Level Manufacturing of MEMS H(2) Sensing Chips Based on Pd Nanoparticles Modified SnO(2) Film Patterns Zhang, Zheng Luo, Liyang Zhang, Yanlin Lv, Guoliang Luo, Yuanyuan Duan, Guotao Adv Sci (Weinh) Research Articles In this manuscript, a simple method combining atomic layer deposition and magnetron sputtering is developed to fabricate high‐performance Pd/SnO(2) film patterns applied for micro‐electro‐mechanical systems (MEMS) H(2) sensing chips. SnO(2) film is first accurately deposited in the central areas of MEMS micro hotplate arrays by a mask‐assistant method, leading the patterns with wafer‐level high consistency in thickness. The grain size and density of Pd nanoparticles modified on the surface of the SnO(2) film are further regulated to obtain an optimized sensing performance. The resulting MEMS H(2) sensing chips show a wide detection range from 0.5 to 500 ppm, high resolution, and good repeatability. Based on the experiments and density functional theory calculations, a sensing enhancement mechanism is also proposed: a certain amount of Pd nanoparticles modified on the SnO(2) surface could bring stronger H(2) adsorption followed by dissociation, diffusion, and reaction with surface adsorbed oxygen species. Obviously, the method provided here is quite simple and effective for the manufacturing of MEMS H(2) sensing chips with high consistency and optimized performance, which may also find broad applications in other MEMS chip technologies. John Wiley and Sons Inc. 2023-07-03 /pmc/articles/PMC10502828/ /pubmed/37400367 http://dx.doi.org/10.1002/advs.202302614 Text en © 2023 The Authors. Advanced Science published by Wiley‐VCH GmbH https://creativecommons.org/licenses/by/4.0/This is an open access article under the terms of the http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.
spellingShingle Research Articles
Zhang, Zheng
Luo, Liyang
Zhang, Yanlin
Lv, Guoliang
Luo, Yuanyuan
Duan, Guotao
Wafer‐Level Manufacturing of MEMS H(2) Sensing Chips Based on Pd Nanoparticles Modified SnO(2) Film Patterns
title Wafer‐Level Manufacturing of MEMS H(2) Sensing Chips Based on Pd Nanoparticles Modified SnO(2) Film Patterns
title_full Wafer‐Level Manufacturing of MEMS H(2) Sensing Chips Based on Pd Nanoparticles Modified SnO(2) Film Patterns
title_fullStr Wafer‐Level Manufacturing of MEMS H(2) Sensing Chips Based on Pd Nanoparticles Modified SnO(2) Film Patterns
title_full_unstemmed Wafer‐Level Manufacturing of MEMS H(2) Sensing Chips Based on Pd Nanoparticles Modified SnO(2) Film Patterns
title_short Wafer‐Level Manufacturing of MEMS H(2) Sensing Chips Based on Pd Nanoparticles Modified SnO(2) Film Patterns
title_sort wafer‐level manufacturing of mems h(2) sensing chips based on pd nanoparticles modified sno(2) film patterns
topic Research Articles
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10502828/
https://www.ncbi.nlm.nih.gov/pubmed/37400367
http://dx.doi.org/10.1002/advs.202302614
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