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High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices
Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with int...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10511541/ https://www.ncbi.nlm.nih.gov/pubmed/37730848 http://dx.doi.org/10.1038/s41598-023-42332-6 |