High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices

Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with int...

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Detalles Bibliográficos
Autores principales: Zikiy, E. V., Ivanov, A. I., Smirnov, N. S., Moskalev, D. O., Polozov, V. I., Matanin, A. R., Malevannaya, E. I., Echeistov, V. V., Konstantinova, T. G., Rodionov, I. A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10511541/
https://www.ncbi.nlm.nih.gov/pubmed/37730848
http://dx.doi.org/10.1038/s41598-023-42332-6

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