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Homogeneity- and Stoichiometry-Induced Electrical and Optical Properties of Cu-Se Thin Films by RF Sputtering Power

P-type Cu-Se thin films were deposited on glass substrates at room temperature using radio frequency magnetron sputtering by a single multi-component CuSe(2) target. When using a multi-component target, the impact of the sputtering power on the homogeneity and stoichiometry within the thin films sho...

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Detalles Bibliográficos
Autores principales: Kim, Sara, Lee, Yong-Seok, Kim, Nam-Hoon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10533086/
https://www.ncbi.nlm.nih.gov/pubmed/37763365
http://dx.doi.org/10.3390/ma16186087