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Homogeneity- and Stoichiometry-Induced Electrical and Optical Properties of Cu-Se Thin Films by RF Sputtering Power
P-type Cu-Se thin films were deposited on glass substrates at room temperature using radio frequency magnetron sputtering by a single multi-component CuSe(2) target. When using a multi-component target, the impact of the sputtering power on the homogeneity and stoichiometry within the thin films sho...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10533086/ https://www.ncbi.nlm.nih.gov/pubmed/37763365 http://dx.doi.org/10.3390/ma16186087 |