Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing

Single-crystal sapphire specimen (α-Al(2)O(3)) have been widely applied in the semiconductor industry, microelectronics, and so on. In order to shorten the production time and improve the processing efficiency of sapphire processing, an integrated fixed-abrasive tool (FAT) based on solid-phase react...

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Detalles Bibliográficos
Autores principales: Cao, Linlin, Zhou, Xiaolong, Wang, Yingjie, Yang, Zhilun, Chen, Duowen, Wei, Wei, Wang, Kaibao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10535465/
https://www.ncbi.nlm.nih.gov/pubmed/37763959
http://dx.doi.org/10.3390/mi14091797

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10535465/
https://www.ncbi.nlm.nih.gov/pubmed/37763959
http://dx.doi.org/10.3390/mi14091797

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