Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope

In capacitive microelectromechanical system (MEMS) devices, the application of dielectric materials causes long-term charging problems in the dielectric layers or substrates, which especially affect the repeatability and stability of high-performance devices. Due to the difficulties of observation a...

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Detalles Bibliográficos
Autores principales: Gao, Mingze, Sun, Jiangkun, Yu, Sheng, Feng, Jun, Ren, Xingjing, Zhang, Yongmeng, Wu, Xuezhong, Xiao, Dingbang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10535826/
https://www.ncbi.nlm.nih.gov/pubmed/37763918
http://dx.doi.org/10.3390/mi14091755

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10535826/
https://www.ncbi.nlm.nih.gov/pubmed/37763918
http://dx.doi.org/10.3390/mi14091755

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