Cargando…
Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope
In capacitive microelectromechanical system (MEMS) devices, the application of dielectric materials causes long-term charging problems in the dielectric layers or substrates, which especially affect the repeatability and stability of high-performance devices. Due to the difficulties of observation a...
| Autores principales: | , , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10535826/ https://www.ncbi.nlm.nih.gov/pubmed/37763918 http://dx.doi.org/10.3390/mi14091755 |