Investigation of the Connection Schemes between Decks in 3D NAND Flash

Dual-deck stacking technology is an effective solution for solving the contradiction between the demand for increasing storage layers and the challenge of the deep hole etching process in 3D NAND flash. The connection scheme between decks is a key technology for the dual-deck structure. It has becom...

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Detalles Bibliográficos
Autores principales: Jia, Jianquan, Jin, Lei, You, Kaikai, Zhu, Anyi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10536591/
https://www.ncbi.nlm.nih.gov/pubmed/37763942
http://dx.doi.org/10.3390/mi14091779

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10536591/
https://www.ncbi.nlm.nih.gov/pubmed/37763942
http://dx.doi.org/10.3390/mi14091779

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