Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si(3)N(4)-SiO(2) Double-Covered Waveguiding Layer

Love surface acoustic wave (L-SAW) sensors are miniaturized, easy to integrate, and suitable for detection in liquid environments. In this paper, an L-SAW sensor with a thin Si(3)N(4)-SiO(2) double-covered layer was proposed for samples with small mass loads. The output response, phase velocity of t...

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Detalles Bibliográficos
Autores principales: Li, Luming, Zhou, Mingyong, Huang, Lei, Jiang, Bingyan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10537863/
https://www.ncbi.nlm.nih.gov/pubmed/37763859
http://dx.doi.org/10.3390/mi14091696

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10537863/
https://www.ncbi.nlm.nih.gov/pubmed/37763859
http://dx.doi.org/10.3390/mi14091696

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