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Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si(3)N(4)-SiO(2) Double-Covered Waveguiding Layer
Love surface acoustic wave (L-SAW) sensors are miniaturized, easy to integrate, and suitable for detection in liquid environments. In this paper, an L-SAW sensor with a thin Si(3)N(4)-SiO(2) double-covered layer was proposed for samples with small mass loads. The output response, phase velocity of t...
| Autores principales: | , , , |
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| Formato: | Online Artigo Texto |
| Idioma: | English |
| Publicado em: |
MDPI
2023
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| Assuntos: | |
| Acesso em linha: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10537863/ https://www.ncbi.nlm.nih.gov/pubmed/37763859 http://dx.doi.org/10.3390/mi14091696 |