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Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket

In this paper, we present a new novel simple iTFET with overlapping gate on source-contact (SGO), Drain Schottky Contact, and intrinsic SiGe pocket (Pocket-SGO iTFET). The aim is to achieve steep subthreshold swing (S.S) and high I(ON) current. By optimizing the gate and source-contact overlap, the...

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Detalles Bibliográficos
Autores principales: Lin, Jyi-Tsong, Lin, Kuan-Pin, Cheng, Kai-Ming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10541387/
https://www.ncbi.nlm.nih.gov/pubmed/37773549
http://dx.doi.org/10.1186/s11671-023-03904-7
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author Lin, Jyi-Tsong
Lin, Kuan-Pin
Cheng, Kai-Ming
author_facet Lin, Jyi-Tsong
Lin, Kuan-Pin
Cheng, Kai-Ming
author_sort Lin, Jyi-Tsong
collection PubMed
description In this paper, we present a new novel simple iTFET with overlapping gate on source-contact (SGO), Drain Schottky Contact, and intrinsic SiGe pocket (Pocket-SGO iTFET). The aim is to achieve steep subthreshold swing (S.S) and high I(ON) current. By optimizing the gate and source-contact overlap, the tunneling efficiency is significantly enhanced, while the ambipolar effect is suppressed. Additionally, using a Schottky contact at the drain/source, instead of ion implantation drain/source, reduces leakage current and thermal budget. Moreover, the tunneling region is replaced by an intrinsic SiGe pocket posing a narrower bandgap, which increases the probability of band-to-band tunneling and enhances the I(ON) current. Our simulations are based on the feasibility of the actual process, thorough Sentaurus TCAD simulations demonstrate that the Pocket-SGO iTFET exhibits an average and minimum subthreshold swing of S.S(avg) = 16.2 mV/Dec and S.S(min) = 4.62 mV/Dec, respectively. At V(D) = 0.2 V, the I(ON) current is 1.81 [Formula: see text] 10(–6) A/μm, and the I(ON)/I(OFF) ratio is 1.34 [Formula: see text] 10(9). The Pocket-SGO iTFET design shows great potential for ultra-low-power devices that are required for the Internet of Things (IoT) and AI applications.
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spelling pubmed-105413872023-10-01 Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket Lin, Jyi-Tsong Lin, Kuan-Pin Cheng, Kai-Ming Discov Nano Research In this paper, we present a new novel simple iTFET with overlapping gate on source-contact (SGO), Drain Schottky Contact, and intrinsic SiGe pocket (Pocket-SGO iTFET). The aim is to achieve steep subthreshold swing (S.S) and high I(ON) current. By optimizing the gate and source-contact overlap, the tunneling efficiency is significantly enhanced, while the ambipolar effect is suppressed. Additionally, using a Schottky contact at the drain/source, instead of ion implantation drain/source, reduces leakage current and thermal budget. Moreover, the tunneling region is replaced by an intrinsic SiGe pocket posing a narrower bandgap, which increases the probability of band-to-band tunneling and enhances the I(ON) current. Our simulations are based on the feasibility of the actual process, thorough Sentaurus TCAD simulations demonstrate that the Pocket-SGO iTFET exhibits an average and minimum subthreshold swing of S.S(avg) = 16.2 mV/Dec and S.S(min) = 4.62 mV/Dec, respectively. At V(D) = 0.2 V, the I(ON) current is 1.81 [Formula: see text] 10(–6) A/μm, and the I(ON)/I(OFF) ratio is 1.34 [Formula: see text] 10(9). The Pocket-SGO iTFET design shows great potential for ultra-low-power devices that are required for the Internet of Things (IoT) and AI applications. Springer US 2023-09-29 /pmc/articles/PMC10541387/ /pubmed/37773549 http://dx.doi.org/10.1186/s11671-023-03904-7 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Research
Lin, Jyi-Tsong
Lin, Kuan-Pin
Cheng, Kai-Ming
Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket
title Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket
title_full Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket
title_fullStr Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket
title_full_unstemmed Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket
title_short Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket
title_sort enhancing subthreshold slope and on-current in a simple itfet with overlapping gate on source-contact, drain schottky contact, and intrinsic sige-pocket
topic Research
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10541387/
https://www.ncbi.nlm.nih.gov/pubmed/37773549
http://dx.doi.org/10.1186/s11671-023-03904-7
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