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Atomic-scale study of TiO(2)-GR nanohybrid formation by ALD: the effect of the gas phase precursor
In the present work, we report on a theoretical-computational study of the growth mechanism of the TiO(2)-Graphene nanohybrid by atomic layer deposition. Hydroxyl groups (OH) are anchoring sites for interacting with the main ALD titanium precursors (Tetrakis (dimethylamino) Titanium, Titanium Tetrac...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
RSC
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10563838/ https://www.ncbi.nlm.nih.gov/pubmed/37822911 http://dx.doi.org/10.1039/d3na00729d |