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Atomic-scale study of TiO(2)-GR nanohybrid formation by ALD: the effect of the gas phase precursor

In the present work, we report on a theoretical-computational study of the growth mechanism of the TiO(2)-Graphene nanohybrid by atomic layer deposition. Hydroxyl groups (OH) are anchoring sites for interacting with the main ALD titanium precursors (Tetrakis (dimethylamino) Titanium, Titanium Tetrac...

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Detalles Bibliográficos
Autores principales:	Rodríguez-Hueso, Jonathan E., Borbón-Nuñez, H. A., Ponce-Pérez, R., Hoat, D. M., Takeuchi, N., Tiznado, H., Guerrero-Sánchez, Jonathan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	RSC 2023
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10563838/ https://www.ncbi.nlm.nih.gov/pubmed/37822911 http://dx.doi.org/10.1039/d3na00729d

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