Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning

Scanning probe lithography (SPL) is a promising technology to fabricate high-resolution, customized and cost-effective features at the nanoscale. However, the quality of nano-fabrication, particularly the critical dimension, is significantly influenced by various SPL fabrication techniques and their...

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Detalles Bibliográficos
Autores principales: Liu, Yijie, Li, Xuexuan, Pei, Ben, Ge, Lin, Xiong, Zhuo, Zhang, Zhen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10564742/
https://www.ncbi.nlm.nih.gov/pubmed/37829156
http://dx.doi.org/10.1038/s41378-023-00587-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10564742/
https://www.ncbi.nlm.nih.gov/pubmed/37829156
http://dx.doi.org/10.1038/s41378-023-00587-z

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