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Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning
Scanning probe lithography (SPL) is a promising technology to fabricate high-resolution, customized and cost-effective features at the nanoscale. However, the quality of nano-fabrication, particularly the critical dimension, is significantly influenced by various SPL fabrication techniques and their...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10564742/ https://www.ncbi.nlm.nih.gov/pubmed/37829156 http://dx.doi.org/10.1038/s41378-023-00587-z |