Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films

Zirconium-based metallic glass films are promising materials for nanoelectronic and biomedical applications, but their mechanical behavior under different conditions is not well understood. This study investigates the effects of radio frequency (RF) power and test temperature on the nanostructure, m...

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Detalles Bibliográficos
Autores principales: Nguyen, Tra Anh Khoa, Dang, Nhat Minh, Lin, Chi-Hang, Lee, Meng-Chieh, Wang, Zhao-Ying, Tsai, Yao-Chuan, Lin, Ming-Tzer
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10574776/
https://www.ncbi.nlm.nih.gov/pubmed/37836318
http://dx.doi.org/10.3390/nano13192677

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10574776/
https://www.ncbi.nlm.nih.gov/pubmed/37836318
http://dx.doi.org/10.3390/nano13192677

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