Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor

This paper reports on the design, modeling, analysis, and evaluation of a micro-electromechanical systems acoustic sensor and the novel design of an acoustic vector sensor array (AVS) which utilized this acoustic sensor. This research builds upon previous work conducted to develop a small, lightweig...

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Detalles Bibliográficos
Autores principales: Ivancic, Justin, Karunasiri, Gamani, Alves, Fabio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10575423/
https://www.ncbi.nlm.nih.gov/pubmed/37837047
http://dx.doi.org/10.3390/s23198217

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10575423/
https://www.ncbi.nlm.nih.gov/pubmed/37837047
http://dx.doi.org/10.3390/s23198217

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