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Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor
This paper reports on the design, modeling, analysis, and evaluation of a micro-electromechanical systems acoustic sensor and the novel design of an acoustic vector sensor array (AVS) which utilized this acoustic sensor. This research builds upon previous work conducted to develop a small, lightweig...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10575423/ https://www.ncbi.nlm.nih.gov/pubmed/37837047 http://dx.doi.org/10.3390/s23198217 |