Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection

Silicon nitride (Si(3)N(4)) waveguides become an appealing choice to realize complex photonic integrated circuits for applications in telecom/datacom transceivers, sensing, and quantum information sciences. However, compared to high-index-contrast silicon-on-insulator platform, the index difference...

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Detalles Bibliográficos
Autores principales: Korček, Radovan, Medina Quiroz, David, Wilmart, Quentin, Edmond, Samson, Cheben, Pavel, Vivien, Laurent, Alonso-Ramos, Carlos, Benedikovič, Daniel
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10576773/
https://www.ncbi.nlm.nih.gov/pubmed/37838803
http://dx.doi.org/10.1038/s41598-023-44824-x

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10576773/
https://www.ncbi.nlm.nih.gov/pubmed/37838803
http://dx.doi.org/10.1038/s41598-023-44824-x

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