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Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection
Silicon nitride (Si(3)N(4)) waveguides become an appealing choice to realize complex photonic integrated circuits for applications in telecom/datacom transceivers, sensing, and quantum information sciences. However, compared to high-index-contrast silicon-on-insulator platform, the index difference...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10576773/ https://www.ncbi.nlm.nih.gov/pubmed/37838803 http://dx.doi.org/10.1038/s41598-023-44824-x |