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The effects of helium, strontium, and silver triple ions implanted into SiC
The effects of helium (He), silver (Ag) and strontium (Sr) ions triple implanted into polycrystalline silicon carbide (SiC) were investigated. Ag ions of 360 keV were first implanted into polycrystalline SiC to a fluence of 2 × 10(16) cm(−2) at 600 °C, followed by implantation of Sr ions of 280 keV...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10585298/ https://www.ncbi.nlm.nih.gov/pubmed/37867893 http://dx.doi.org/10.1016/j.heliyon.2023.e20877 |