High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

[Image: see text] Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the stre...

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Detalles Bibliográficos
Autores principales: Lopez-Rodriguez, Bruno, van der Kolk, Roald, Aggarwal, Samarth, Sharma, Naresh, Li, Zizheng, van der Plaats, Daniel, Scholte, Thomas, Chang, Jin, Gröblacher, Simon, Pereira, Silvania F., Bhaskaran, Harish, Zadeh, Iman Esmaeil
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10588551/
https://www.ncbi.nlm.nih.gov/pubmed/37869559
http://dx.doi.org/10.1021/acsphotonics.3c00968

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10588551/
https://www.ncbi.nlm.nih.gov/pubmed/37869559
http://dx.doi.org/10.1021/acsphotonics.3c00968

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