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High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature
[Image: see text] Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the stre...
| Autores principales: | , , , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10588551/ https://www.ncbi.nlm.nih.gov/pubmed/37869559 http://dx.doi.org/10.1021/acsphotonics.3c00968 |