A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors

In this paper, a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of freedom. This novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal...

Descripción completa

Detalles Bibliográficos
Autores principales: Meng, Qinggang, Wang, Junbo, Chen, Deyong, Chen, Jian, Xie, Bo, Lu, Yulan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10600208/
https://www.ncbi.nlm.nih.gov/pubmed/37900976
http://dx.doi.org/10.1038/s41378-023-00596-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10600208/
https://www.ncbi.nlm.nih.gov/pubmed/37900976
http://dx.doi.org/10.1038/s41378-023-00596-y

Ejemplares similares