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A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors

In this paper, a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of freedom. This novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal...

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Autores principales: Meng, Qinggang, Wang, Junbo, Chen, Deyong, Chen, Jian, Xie, Bo, Lu, Yulan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10600208/
https://www.ncbi.nlm.nih.gov/pubmed/37900976
http://dx.doi.org/10.1038/s41378-023-00596-y
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author Meng, Qinggang
Wang, Junbo
Chen, Deyong
Chen, Jian
Xie, Bo
Lu, Yulan
author_facet Meng, Qinggang
Wang, Junbo
Chen, Deyong
Chen, Jian
Xie, Bo
Lu, Yulan
author_sort Meng, Qinggang
collection PubMed
description In this paper, a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of freedom. This novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal design after multiple iterations. The proposed method was utilized to optimize the pressure-sensitive diaphragm of a piezoresistive pressure sensor (PPS). Finite element method (FEM) simulations revealed that, in comparison to conventional diaphragms without islands and with square islands, the optimized diaphragm increased the stress by 10% and 16% and reduced the nonlinearity by 57% and 77%, respectively. These improvements demonstrate the value of this method. Characterization of the fabricated PPS revealed a high sensitivity of 8.8 mV V(−1) MPa(−1) and a low nonlinearity of 0.058% FS at 20 °C, indicating excellent sensor performance. [Image: see text]
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spelling pubmed-106002082023-10-27 A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors Meng, Qinggang Wang, Junbo Chen, Deyong Chen, Jian Xie, Bo Lu, Yulan Microsyst Nanoeng Article In this paper, a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of freedom. This novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal design after multiple iterations. The proposed method was utilized to optimize the pressure-sensitive diaphragm of a piezoresistive pressure sensor (PPS). Finite element method (FEM) simulations revealed that, in comparison to conventional diaphragms without islands and with square islands, the optimized diaphragm increased the stress by 10% and 16% and reduced the nonlinearity by 57% and 77%, respectively. These improvements demonstrate the value of this method. Characterization of the fabricated PPS revealed a high sensitivity of 8.8 mV V(−1) MPa(−1) and a low nonlinearity of 0.058% FS at 20 °C, indicating excellent sensor performance. [Image: see text] Nature Publishing Group UK 2023-10-25 /pmc/articles/PMC10600208/ /pubmed/37900976 http://dx.doi.org/10.1038/s41378-023-00596-y Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Meng, Qinggang
Wang, Junbo
Chen, Deyong
Chen, Jian
Xie, Bo
Lu, Yulan
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
title A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
title_full A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
title_fullStr A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
title_full_unstemmed A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
title_short A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
title_sort novel evolutionary method for parameter-free mems structural design and its application in piezoresistive pressure sensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10600208/
https://www.ncbi.nlm.nih.gov/pubmed/37900976
http://dx.doi.org/10.1038/s41378-023-00596-y
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