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A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
In this paper, a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of freedom. This novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10600208/ https://www.ncbi.nlm.nih.gov/pubmed/37900976 http://dx.doi.org/10.1038/s41378-023-00596-y |