Thermal Stability and Orthogonal Functionalization of Organophosphonate Self-Assembled Monolayers as Potential Liners for Cu Interconnect

[Image: see text] In this study, we investigated the thermal stabilities of butylphosphonic acid (BPA) and aminopropyltriethoxysilane (APTES) self-assembled monolayers (SAM) on a Si substrate. The thermal desorption and the thermal cleavage of the BPA and APTES SAM film on the Si substrate were stud...

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Detalles Bibliográficos
Autores principales: Chou, Yu-Wei, Chang, Shou-Yi, Keng, Pei Yuin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10601072/
https://www.ncbi.nlm.nih.gov/pubmed/37901487
http://dx.doi.org/10.1021/acsomega.3c05629

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10601072/
https://www.ncbi.nlm.nih.gov/pubmed/37901487
http://dx.doi.org/10.1021/acsomega.3c05629

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