Varifocal MEMS mirrors for high-speed axial focus scanning: a review

Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operatio...

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Detalles Bibliográficos
Autores principales: Pribošek, Jaka, Bainschab, Markus, Sasaki, Takashi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Review Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10603115/
https://www.ncbi.nlm.nih.gov/pubmed/37900975
http://dx.doi.org/10.1038/s41378-022-00481-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10603115/
https://www.ncbi.nlm.nih.gov/pubmed/37900975
http://dx.doi.org/10.1038/s41378-022-00481-0

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